Prior Scientific H105 Microscope Stage

H105 Microscope Stage Key Features

  • Suitable for most major brand microscopes.
  • 1µm or better repeatability
  • Quiet and reliable
  • Wide range of sample holders
  • Optional 100nm linear scales provide the highest precision available

H105 Microscope Stage Description

The H105 Microscope Stage is especially well-suited for applications that typically involve large specimens. For example, for performing scanning of a wide range of semiconductor wafers, photo masks, and printed circuit boards. The H105 Microscope Stage can easily accommodate 6″ wafers. H105 stage are fully mapped for improved metric accuracy.

H105 Microscope Stage Specifications

um um mm/s mm kg mm SPR ** um res
Repeatability *
Min Step
Max Travel
Weight Ball Screw
H105/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 No
HE05/2 ## +/- 0.7 0.04 24 154 x 154 5 2 200 0.1


Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanTM controllers with backlash correction enabled, all repeatability is Uni-directional.
**S.P.R: Full steps per revolution of motor.

Meyer Instruments, Inc., is an authorized Reseller/Dealer for Prior Scientific
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