Prior Scientific H116 Microscope Stage
H116 Microscope Stage Key Features
- Suitable for most major brand microscopes.
- 1µm or better repeatability
- Quiet and reliable
- Wide range of wafer holders.
- 255mm x 215mm (10″x8.5″) travel
H116 Microscope Stage Description
The H116 Microscope Stage stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.
H116 Microscope Stage Specifications
|um||um||mm/s||mm||kg||mm||SPR **||um res|
|H116ARNN||+/- 0.7||0.04||40||255 X 215||7.7||2||200||No|
|H116ARN1||+/- 0.7||0.01||40||255 X 215||7.7||2||200||0.1|
|H116BRNN||+/- 0.7||0.1||40||255 X 215||7.7||5||200||No|
|H116BRN2||+/- 0.7||0.5||40||255 X 215||7.7||5||200||0.1|
Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanT controllers with backlash correction enabled, all repeatability is Uni-directiona
**S.P.R: Full steps per revolution of motor.