Prior Scientific H116 Microscope Stage
H116 Microscope Stage Key Features
- Suitable for most major brand microscopes.
- 1µm or better repeatability
- Quiet and reliable
- Wide range of wafer holders.
- 255mm x 215mm (10″x8.5″) travel
H116 Microscope Stage Description
The H116 Microscope Stage stage is suitable for most larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.
H116 Microscope Stage Specifications
| um | um | mm/s | mm | kg | mm | SPR ** | um res | |
| Uni-Directional Repeatability * |
Min Step Size |
Recomended speed |
Max Travel Range |
Weight | Ball Screw Pitch |
Motor Type |
Encoders | |
| H116ARNN | +/- 0.7 | 0.04 | 40 | 255 X 215 | 7.7 | 2 | 200 | No |
| H116ARN1 | +/- 0.7 | 0.01 | 40 | 255 X 215 | 7.7 | 2 | 200 | 0.1 |
| H116BRNN | +/- 0.7 | 0.1 | 40 | 255 X 215 | 7.7 | 5 | 200 | No |
| H116BRN2 | +/- 0.7 | 0.5 | 40 | 255 X 215 | 7.7 | 5 | 200 | 0.1 |
Requires the use of a Prior ProScanTM II or above controller and are based on Prior method of testing.
*Using a Prior ProScanT controllers with backlash correction enabled, all repeatability is Uni-directiona
**S.P.R: Full steps per revolution of motor.
